Suppression of Kink in the Output Characteristics of AlInN/GaN High Electron Mobility Transistors by Post-Gate Metallization Annealing

In this paper, we report the effect of post-gate metallization annealing on the performance of GaN-based High Electron Mobility Transistors (HEMTs). The performances of HEMTs annealed at 200 °C (HEMT1) and at 400 °C (HEMT2) for 5 minutes in N2 ambient are compared. While there...

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Main Authors: Sujan Sarkar, Ramdas P. Khade, Ajay Shanbhag, Nandita DasGupta, Amitava DasGupta
Format: Article
Language:English
Published: IEEE 2023-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9963604/
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author Sujan Sarkar
Ramdas P. Khade
Ajay Shanbhag
Nandita DasGupta
Amitava DasGupta
author_facet Sujan Sarkar
Ramdas P. Khade
Ajay Shanbhag
Nandita DasGupta
Amitava DasGupta
author_sort Sujan Sarkar
collection DOAJ
description In this paper, we report the effect of post-gate metallization annealing on the performance of GaN-based High Electron Mobility Transistors (HEMTs). The performances of HEMTs annealed at 200 °C (HEMT1) and at 400 °C (HEMT2) for 5 minutes in N2 ambient are compared. While there is a kink in the output characteristics of HEMT1, there is no such kink in the output characteristics of HEMT2. The kink is attributed to impact ionization in the GaN channel. Surface and interface traps of HEMT1 increase the peak electric field at the drain side gate edge and cause impact ionization. The post-gate metallization annealing at a higher temperature reduces the surface and interface traps, which reduces the peak electric field in HEMT2 and suppresses impact ionization. This is substantiated by TCAD simulations. Threshold voltage instability on the application of negative gate bias stress was also examined for these devices. A positive shift in threshold voltage was observed in HEMT1 on the application of negative gate bias stress, whereas the corresponding shift was negative in HEMT2, indicating the presence of two different types of traps in HEMT1 and HEMT2.
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spelling doaj.art-ba5d7f335eef4f758d3f19ef237336ce2023-02-21T00:00:36ZengIEEEIEEE Journal of the Electron Devices Society2168-67342023-01-0111788310.1109/JEDS.2022.32245009963604Suppression of Kink in the Output Characteristics of AlInN/GaN High Electron Mobility Transistors by Post-Gate Metallization AnnealingSujan Sarkar0https://orcid.org/0000-0001-7973-3933Ramdas P. Khade1https://orcid.org/0000-0003-0058-1362Ajay Shanbhag2https://orcid.org/0000-0002-2858-1666Nandita DasGupta3https://orcid.org/0000-0001-8495-9398Amitava DasGupta4Department of Electrical Engineering, Indian Institute of Technology Madras, Chennai, IndiaDepartment of Electrical Engineering, Indian Institute of Technology Madras, Chennai, IndiaDepartment of Electrical Engineering, Indian Institute of Technology Madras, Chennai, IndiaDepartment of Electrical Engineering, Indian Institute of Technology Madras, Chennai, IndiaDepartment of Electrical Engineering, Indian Institute of Technology Madras, Chennai, IndiaIn this paper, we report the effect of post-gate metallization annealing on the performance of GaN-based High Electron Mobility Transistors (HEMTs). The performances of HEMTs annealed at 200 °C (HEMT1) and at 400 °C (HEMT2) for 5 minutes in N2 ambient are compared. While there is a kink in the output characteristics of HEMT1, there is no such kink in the output characteristics of HEMT2. The kink is attributed to impact ionization in the GaN channel. Surface and interface traps of HEMT1 increase the peak electric field at the drain side gate edge and cause impact ionization. The post-gate metallization annealing at a higher temperature reduces the surface and interface traps, which reduces the peak electric field in HEMT2 and suppresses impact ionization. This is substantiated by TCAD simulations. Threshold voltage instability on the application of negative gate bias stress was also examined for these devices. A positive shift in threshold voltage was observed in HEMT1 on the application of negative gate bias stress, whereas the corresponding shift was negative in HEMT2, indicating the presence of two different types of traps in HEMT1 and HEMT2.https://ieeexplore.ieee.org/document/9963604/HEMTimpact ionizationfloating sourcenegative gate bias stresstraps
spellingShingle Sujan Sarkar
Ramdas P. Khade
Ajay Shanbhag
Nandita DasGupta
Amitava DasGupta
Suppression of Kink in the Output Characteristics of AlInN/GaN High Electron Mobility Transistors by Post-Gate Metallization Annealing
IEEE Journal of the Electron Devices Society
HEMT
impact ionization
floating source
negative gate bias stress
traps
title Suppression of Kink in the Output Characteristics of AlInN/GaN High Electron Mobility Transistors by Post-Gate Metallization Annealing
title_full Suppression of Kink in the Output Characteristics of AlInN/GaN High Electron Mobility Transistors by Post-Gate Metallization Annealing
title_fullStr Suppression of Kink in the Output Characteristics of AlInN/GaN High Electron Mobility Transistors by Post-Gate Metallization Annealing
title_full_unstemmed Suppression of Kink in the Output Characteristics of AlInN/GaN High Electron Mobility Transistors by Post-Gate Metallization Annealing
title_short Suppression of Kink in the Output Characteristics of AlInN/GaN High Electron Mobility Transistors by Post-Gate Metallization Annealing
title_sort suppression of kink in the output characteristics of alinn gan high electron mobility transistors by post gate metallization annealing
topic HEMT
impact ionization
floating source
negative gate bias stress
traps
url https://ieeexplore.ieee.org/document/9963604/
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AT ajayshanbhag suppressionofkinkintheoutputcharacteristicsofalinnganhighelectronmobilitytransistorsbypostgatemetallizationannealing
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