Morphological Aspects of Oxidized Porous Silicon Prepared by Photo Electrochemical Etching
This paper reports morphological properties of porous silicon and oxidizedporous silicon, prepared by photo electrochemical etching from n-type silicon wafers asa function of experimental parameters. Scanning electron microscopic (SEM)Observations of porous silicon layers were obtained before and af...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Unviversity of Technology- Iraq
2010-01-01
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Series: | Engineering and Technology Journal |
Subjects: | |
Online Access: | https://etj.uotechnology.edu.iq/article_26948_1dfc865cdbed6cf8d577c75aa4e5e62f.pdf |