Thin-Film-Based SAW Magnetic Field Sensors

Thin-Film-Based SAW Magnetic Field Sensors

In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The acoustically active area consists of an AlScN layer that can be...

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Bibliographic Details
Main Authors: Jana Marie Meyer, Viktor Schell, Jingxiang Su, Simon Fichtner, Erdem Yarar, Florian Niekiel, Thorsten Giese, Anne Kittmann, Lars Thormählen, Vadim Lebedev, Stefan Moench, Agnė Žukauskaitė, Eckhard Quandt, Fabian Lofink
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Sensors
Subjects:
surface acoustic waves
surface acoustic wave sensor
magnetic field sensor
current sensor
magnetostriction
AlScN
Online Access:https://www.mdpi.com/1424-8220/21/24/8166

Internet

https://www.mdpi.com/1424-8220/21/24/8166

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