Study of the Optoelectronic Properties of Titanium Nitride Thin Films Deposited on Glass by Reactive Sputtering in the Cathodic Cage

Study of the Optoelectronic Properties of Titanium Nitride Thin Films Deposited on Glass by Reactive Sputtering in the Cathodic Cage

We investigate the structural, optical, thermal-optical, and electronic properties of TiNx thin films utilizing a variety of experimental techniques, including spectroscopic ellipsometry, Raman spectroscopy, scanning electron microscopy, atomic force microscopy, thermal lens spectroscopy, and UV-VIS...

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Bibliographic Details
Main Authors: Hunos Paixão Madureira, Renan Matos Monção, Adriano Almeida Silva, Angel Alberto Hidalgo, Maria Letícia Vega, Michelle Cequeira Feitor, Francisco Eroni Paz Santos, Thércio Henrique de Carvalho Costa, Rômulo Ribeiro Magalhães de Sousa
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2023-10-01
Series:Materials Research
Subjects:
Plasma Deposition
Cathode Cage
Titanium Nitride
Thin Films
Online Access:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392023000100309&lng=en&tlng=en

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