Computer vision distortion correction of scanning probe microscopy images
Abstract Since its inception, scanning probe microscopy (SPM) has established itself as the tool of choice for probing surfaces and functionalities at the nanoscale. Although recent developments in the instrumentation have greatly improved the metrological aspects of SPM, it is still plagued by the...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2017-04-01
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Series: | Scientific Reports |
Online Access: | https://doi.org/10.1038/s41598-017-00765-w |