Effect of Microstructure of TiN /TiCN Layer on the Structural, Mechanical and Tribological Properties of the Ti/TiN/TiCN Films
A direct current magnetron sputtering (DCMS) system at room temperature was applied to deposit the Ti/TiN/TiCN films. In order to research the effect of the microstructure of the TiN/TiCN layer on the Ti/TiN/TiCN films, the deposition time ratio of the TiN/TiCN layer ranged from 28.57 to 200%, and t...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-01-01
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| Series: | Lubricants |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-4442/11/1/21 |