Wear properties of HFCVD diamond films on SiC substrate

Wear properties of HFCVD diamond films on SiC substrate

Micro-diamond film, nano-diamond film and diamond-graphite composite film were deposited on silicon carbide substrate by hot filament chemical vapor deposition. The surface morphology and phase of the grown diamond films were analyzed using scanning electron microscope, atomic force microscope and R...

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Bibliographic Details
Main Authors: He WANG, Jianhui SHEN, Lusheng LIU, Guangyu YAN, Yuhou WU, Jiaji XIONG, Cristea DANIEL
Format: Article
Language:zho
Published: Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2022-06-01
Series:Jin'gangshi yu moliao moju gongcheng
Subjects:
diamond film
silicon carbide
graphite
friction and wear
hot filament chemical vapor deposition
Online Access:http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.0206

Internet

http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.0206

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