Wear properties of HFCVD diamond films on SiC substrate
Micro-diamond film, nano-diamond film and diamond-graphite composite film were deposited on silicon carbide substrate by hot filament chemical vapor deposition. The surface morphology and phase of the grown diamond films were analyzed using scanning electron microscope, atomic force microscope and R...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | zho |
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Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
2022-06-01
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| Series: | Jin'gangshi yu moliao moju gongcheng |
| Subjects: | |
| Online Access: | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.0206 |
| _version_ | 1827927877087133696 |
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| author | He WANG Jianhui SHEN Lusheng LIU Guangyu YAN Yuhou WU Jiaji XIONG Cristea DANIEL |
| author_facet | He WANG Jianhui SHEN Lusheng LIU Guangyu YAN Yuhou WU Jiaji XIONG Cristea DANIEL |
| author_sort | He WANG |
| collection | DOAJ |
| description | Micro-diamond film, nano-diamond film and diamond-graphite composite film were deposited on silicon carbide substrate by hot filament chemical vapor deposition. The surface morphology and phase of the grown diamond films were analyzed using scanning electron microscope, atomic force microscope and Raman spectrometer. The friction coefficient and the wear rate of diamond films were measured by friction experiments. The friction and wear properties of diamond films were studied by comparing the experimental results. The results show that the diamond-graphite composite film has better friction and wear properties, the surface roughness of which is 53.8 nm. The friction coefficient (0.040) is similar to that of the nano-diamond film (0.037), while the wear rate is the lowest, 2.07×10−7 mm3·N−1·m−1. Compared with those of SiC substrate, the wear rate (9.89×10−5 mm3·N−1·m−1) and the friction coefficient (0.580) of the diamond films have been greatly improved, which indicates that depositing diamond on the surface of SiC substrate significantly improves the performance of the silicon carbide in the field of friction. |
| first_indexed | 2024-03-13T05:59:22Z |
| format | Article |
| id | doaj.art-bbb7b194d7df424b851b975d933eb4f1 |
| institution | Directory Open Access Journal |
| issn | 1006-852X |
| language | zho |
| last_indexed | 2024-03-13T05:59:22Z |
| publishDate | 2022-06-01 |
| publisher | Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. |
| record_format | Article |
| series | Jin'gangshi yu moliao moju gongcheng |
| spelling | doaj.art-bbb7b194d7df424b851b975d933eb4f12023-06-13T01:54:00ZzhoZhengzhou Research Institute for Abrasives & Grinding Co., Ltd.Jin'gangshi yu moliao moju gongcheng1006-852X2022-06-0142328328910.13394/j.cnki.jgszz.2021.0206zxh3whWear properties of HFCVD diamond films on SiC substrateHe WANG0Jianhui SHEN1Lusheng LIU2Guangyu YAN3Yuhou WU4Jiaji XIONG5Cristea DANIEL6Joint International Research Laboratory of Modern Construction Engineering Equipment and Technology, Shenyang 110168, ChinaJoint International Research Laboratory of Modern Construction Engineering Equipment and Technology, Shenyang 110168, ChinaShenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, ChinaJoint International Research Laboratory of Modern Construction Engineering Equipment and Technology, Shenyang 110168, ChinaJoint International Research Laboratory of Modern Construction Engineering Equipment and Technology, Shenyang 110168, ChinaShenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, ChinaMaterials Science and Engineering Faculty, Transilvania University of Brasov, Brasov 500036, RomaniaMicro-diamond film, nano-diamond film and diamond-graphite composite film were deposited on silicon carbide substrate by hot filament chemical vapor deposition. The surface morphology and phase of the grown diamond films were analyzed using scanning electron microscope, atomic force microscope and Raman spectrometer. The friction coefficient and the wear rate of diamond films were measured by friction experiments. The friction and wear properties of diamond films were studied by comparing the experimental results. The results show that the diamond-graphite composite film has better friction and wear properties, the surface roughness of which is 53.8 nm. The friction coefficient (0.040) is similar to that of the nano-diamond film (0.037), while the wear rate is the lowest, 2.07×10−7 mm3·N−1·m−1. Compared with those of SiC substrate, the wear rate (9.89×10−5 mm3·N−1·m−1) and the friction coefficient (0.580) of the diamond films have been greatly improved, which indicates that depositing diamond on the surface of SiC substrate significantly improves the performance of the silicon carbide in the field of friction.http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.0206diamond filmsilicon carbidegraphitefriction and wearhot filament chemical vapor deposition |
| spellingShingle | He WANG Jianhui SHEN Lusheng LIU Guangyu YAN Yuhou WU Jiaji XIONG Cristea DANIEL Wear properties of HFCVD diamond films on SiC substrate Jin'gangshi yu moliao moju gongcheng diamond film silicon carbide graphite friction and wear hot filament chemical vapor deposition |
| title | Wear properties of HFCVD diamond films on SiC substrate |
| title_full | Wear properties of HFCVD diamond films on SiC substrate |
| title_fullStr | Wear properties of HFCVD diamond films on SiC substrate |
| title_full_unstemmed | Wear properties of HFCVD diamond films on SiC substrate |
| title_short | Wear properties of HFCVD diamond films on SiC substrate |
| title_sort | wear properties of hfcvd diamond films on sic substrate |
| topic | diamond film silicon carbide graphite friction and wear hot filament chemical vapor deposition |
| url | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.0206 |
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