Performance Degradation in Static Random Access Memory of 10 nm Node FinFET Owing to Displacement Defects

We comprehensively investigate displacement-defect-induced current and static noise margin variations in six-transistor (6T) static random access memory (SRAM) based on a 10 nm node fin field-effect transistor (FinFET) using technology computer-aided design (TCAD). Various defect cluster conditions...

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Bibliographic Details
Main Authors: Minji Bang, Jonghyeon Ha, Gyeongyeop Lee, Minki Suh, Jungsik Kim
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/5/1090