Ultra-low thermal conductivity and acoustic dynamics of Si nanostructured metalattices probed using ultrafast high harmonic beams
We extend optical nanometrology capabilities to smaller dimensions by using tabletop coherent extreme ultraviolet (EUV) beams. Specifically, we characterize thermal transport and acoustic wave propagation in 3D periodic silicon inverse metalattices with <15nm characteristic dimensions. Measuremen...
Main Authors: | , , , , , , , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2019-01-01
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Series: | EPJ Web of Conferences |
Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2019/10/epjconf_up2019_04006.pdf |