Ultra-low thermal conductivity and acoustic dynamics of Si nanostructured metalattices probed using ultrafast high harmonic beams

Ultra-low thermal conductivity and acoustic dynamics of Si nanostructured metalattices probed using ultrafast high harmonic beams

We extend optical nanometrology capabilities to smaller dimensions by using tabletop coherent extreme ultraviolet (EUV) beams. Specifically, we characterize thermal transport and acoustic wave propagation in 3D periodic silicon inverse metalattices with <15nm characteristic dimensions. Measuremen...

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Bibliographic Details
Main Authors: Abad Begoña, Frazer Travis, Knobloch Joshua, Hernández-Charpak Jorge, Cheng Hiu, Grede Alex, Giebink Noel, Mallouk Tom, Mahale Pratibha, Chen Weinan, Xiong Yihuang, Dabo Ismaila, Crespi Vincent, Talreja Disha, Gopalan Venkat, Badding John, Kapteyn Henry, Murnane Margaret
Format: Article
Language:English
Published: EDP Sciences 2019-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2019/10/epjconf_up2019_04006.pdf

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