Radiation-Stimulated Formation of Two-Dimensional Structures Based on Calcium Silicide
The formation of CaSi<sub>2</sub> polycrystalline structures under the postgrowth electron irradiation of epitaxial CaF<sub>2</sub>/Si(111) films with embedded thin Si layers was studied. The dependence on the electron exposure time was investigated for two types of structure...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-10-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/12/20/3623 |