Monolithic 3D 6T-SRAM Based on Newly Designed Gate and Source/Drain Bottom Contact Schemes

For the first time, we suggested that the monolithic 3D (M3D) static random access memory (SRAM) with gate and S/D bottom contact (GBC and SDBC) schemes (SRAM<sub>SDGBC</sub>) and analyzed they could significantly improve the power, performance, and area (PPA) compared to the conventiona...

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Bibliographic Details
Main Authors: Junjong Lee, Jun-Sik Yoon, Jinsu Jeong, Seunghwan Lee, Sanguk Lee, Rock-Hyun Baek
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9558762/