A proposed methodology to develop digital twin framework for plasma processing

Plasma processing presents complex behavioural characteristics that are created by different generation and processing methods. In this context, the digital twin (DT) method offers a visualisation and simulation techniques that enable better understanding of plasma complexities, control, and precisi...

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Bibliographic Details
Main Authors: Alasdair Mitchell, Xinyang Wei, Rongyan Sun, Kazuya Yamamura, Long Ye, Jonathan Corney, Nan Yu
Format: Article
Language:English
Published: Elsevier 2024-12-01
Series:Results in Engineering
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2590123024017146