An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor

An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor

A novel gas-sealed capacitive pressure sensor with a temperature compensation structure is reported. The pressure sensor is sealed by Au-Au diffusion bonding under a nitrogen ambient with a pressure of 100 kPa and integrated with a platinum resistor-based temperature sensor for human activity monito...

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Bibliographic Details
Main Authors: Kohei Higuchi, Yonggang Jiang, Kazusuke Maenaka, Hidekuni Takao, Xiuchun Hao
Format: Article
Language:English
Published: MDPI AG 2012-06-01
Series:Sensors
Subjects:
pressure sensor
mechanical temperature compensation
gas-sealed
Online Access:http://www.mdpi.com/1424-8220/12/6/8026

Internet

http://www.mdpi.com/1424-8220/12/6/8026

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