Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement Uncertainty
This paper presents a test stand for testing alternating current electrical parameters of Cu–SiO<sub>2</sub> multilayer nanocomposite structures obtained by the dual-source non-reactive magnetron sputtering method (resistance, capacitance, phase shift angle, and dielectric loss angle tan...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-03-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/23/5/2842 |