Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement Uncertainty
This paper presents a test stand for testing alternating current electrical parameters of Cu–SiO<sub>2</sub> multilayer nanocomposite structures obtained by the dual-source non-reactive magnetron sputtering method (resistance, capacitance, phase shift angle, and dielectric loss angle tan...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-03-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/5/2842 |
| _version_ | 1797614323269369856 |
|---|---|
| author | Aleksandra Wilczyńska Andrzej Kociubiński Tomasz N. Kołtunowicz |
| author_facet | Aleksandra Wilczyńska Andrzej Kociubiński Tomasz N. Kołtunowicz |
| author_sort | Aleksandra Wilczyńska |
| collection | DOAJ |
| description | This paper presents a test stand for testing alternating current electrical parameters of Cu–SiO<sub>2</sub> multilayer nanocomposite structures obtained by the dual-source non-reactive magnetron sputtering method (resistance, capacitance, phase shift angle, and dielectric loss angle tangent δ). In order to confirm the dielectric nature of the test structure, measurements in the temperature range from room temperature to 373 K were carried out. The alternating current frequencies in which the measurements were made ranged from 4 Hz to 7.92 MHz. To improve the implementation of measurement processes, a program was written to control the impedance meter in the MATLAB environment. Structural studies by SEM were conducted to determine the effect of annealing on multilayer nanocomposite structures. Based on the static analysis of the 4-point method of measurements, the standard uncertainty of type A was determined, and taking into account the manufacturer’s recommendations regarding the technical specification, the measurement uncertainty of type B. |
| first_indexed | 2024-03-11T07:09:49Z |
| format | Article |
| id | doaj.art-bcd84fddcd6c4db58117852c0923d0d6 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-11T07:09:49Z |
| publishDate | 2023-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-bcd84fddcd6c4db58117852c0923d0d62023-11-17T08:40:28ZengMDPI AGSensors1424-82202023-03-01235284210.3390/s23052842Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement UncertaintyAleksandra Wilczyńska0Andrzej Kociubiński1Tomasz N. Kołtunowicz2Department of Electrical Devices and High Voltage Technology, Lublin University of Technology, 20-618 Lublin, PolandDepartment of Electronic and Information Technologies, Lublin University of Technology, 20-618 Lublin, PolandDepartment of Electrical Devices and High Voltage Technology, Lublin University of Technology, 20-618 Lublin, PolandThis paper presents a test stand for testing alternating current electrical parameters of Cu–SiO<sub>2</sub> multilayer nanocomposite structures obtained by the dual-source non-reactive magnetron sputtering method (resistance, capacitance, phase shift angle, and dielectric loss angle tangent δ). In order to confirm the dielectric nature of the test structure, measurements in the temperature range from room temperature to 373 K were carried out. The alternating current frequencies in which the measurements were made ranged from 4 Hz to 7.92 MHz. To improve the implementation of measurement processes, a program was written to control the impedance meter in the MATLAB environment. Structural studies by SEM were conducted to determine the effect of annealing on multilayer nanocomposite structures. Based on the static analysis of the 4-point method of measurements, the standard uncertainty of type A was determined, and taking into account the manufacturer’s recommendations regarding the technical specification, the measurement uncertainty of type B.https://www.mdpi.com/1424-8220/23/5/2842nanocompositesmultilayersmagnetron sputteringimpedance spectroscopySEMmeasurement uncertainty |
| spellingShingle | Aleksandra Wilczyńska Andrzej Kociubiński Tomasz N. Kołtunowicz Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement Uncertainty Sensors nanocomposites multilayers magnetron sputtering impedance spectroscopy SEM measurement uncertainty |
| title | Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement Uncertainty |
| title_full | Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement Uncertainty |
| title_fullStr | Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement Uncertainty |
| title_full_unstemmed | Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement Uncertainty |
| title_short | Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement Uncertainty |
| title_sort | preparation of discontinuous cu sio sub 2 sub multilayers ac conduction and determining the measurement uncertainty |
| topic | nanocomposites multilayers magnetron sputtering impedance spectroscopy SEM measurement uncertainty |
| url | https://www.mdpi.com/1424-8220/23/5/2842 |
| work_keys_str_mv | AT aleksandrawilczynska preparationofdiscontinuouscusiosub2submultilayersacconductionanddeterminingthemeasurementuncertainty AT andrzejkociubinski preparationofdiscontinuouscusiosub2submultilayersacconductionanddeterminingthemeasurementuncertainty AT tomasznkołtunowicz preparationofdiscontinuouscusiosub2submultilayersacconductionanddeterminingthemeasurementuncertainty |