Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement Uncertainty

Preparation of Discontinuous Cu/SiO<sub>2</sub> Multilayers—AC Conduction and Determining the Measurement Uncertainty

This paper presents a test stand for testing alternating current electrical parameters of Cu–SiO<sub>2</sub> multilayer nanocomposite structures obtained by the dual-source non-reactive magnetron sputtering method (resistance, capacitance, phase shift angle, and dielectric loss angle tan...

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Bibliographic Details
Main Authors: Aleksandra Wilczyńska, Andrzej Kociubiński, Tomasz N. Kołtunowicz
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Sensors
Subjects:
nanocomposites
multilayers
magnetron sputtering
impedance spectroscopy
SEM
measurement uncertainty
Online Access:https://www.mdpi.com/1424-8220/23/5/2842

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