Simulation of Germanium-on-Nothing cavity’s morphological transformation using deep learning

Abstract Unique self-assembled germanium structures known as Germanium-on-Nothing (GON), which are fabricated via annealing, have buried multiscale cavities with different morphologies. Due to their unique sub-surface morphologies, GON structures are utilized in various applications including optoel...

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Bibliographic Details
Main Authors: Jaewoo Jeong, Taeyeong Kim, Jungchul Lee
Format: Article
Language:English
Published: SpringerOpen 2022-12-01
Series:Micro and Nano Systems Letters
Subjects:
Online Access:https://doi.org/10.1186/s40486-022-00164-5