Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions

Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions

This study investigates the influence of substrate (AISI M42 tool steel) bias voltage (from −30 to −80 V), on the mechanical properties of magnetron sputtered TiSiN coating derived from Ti and Si targets. Thermal stability, microstructure (crystallite size, microstrain, lattice constant), morphology...

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Bibliographic Details
Main Authors: Ehsan Mohammadpour, Willey Yun Hsien Liew, Nicholas Mondinos, Mohammednoor Altarawneh, Sunghwan Lee, Nik Radevski, Manickam Minakshi, Amun Amri, Hong Ngee Lim, Zhong-Tao Jiang
Format: Article
Language:English
Published: Elsevier 2022-03-01
Series:Journal of Materials Research and Technology
Subjects:
Synchrotron radiation
Thermal stability
Mechanical properties
Oxidation
Bias voltage
TiSiN
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785422000394

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http://www.sciencedirect.com/science/article/pii/S2238785422000394

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