Fabrication of high quantum efficiency p-i-n AlGaN detector and optimization of p-layer and i-layer thickness
In this paper, the fabrication process and structure of AlGaN based p-i-n photodetectors with different layer thicknesses are described. The maximum external quantum efficiency (EQE) of back illumination is 87.87% at zero bias. According to the Poisson equation, the electric field distribution of th...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2020-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/abca6e |