Determination of oxygen mass fraction and distribution in aluminum nitride ceramics
Aluminum nitride ceramics have become the important packaging materials for integrated circuits, semiconductors, and high-power devices due to the excellent thermal conductivity. The oxygen impurities in aluminum nitride ceramics directly affect the thermal conductivity. Thus, it is important to acc...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Powder Metallurgy Technology
2023-04-01
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| Series: | Fenmo yejin jishu |
| Subjects: | |
| Online Access: | https://pmt.ustb.edu.cn/article/doi/10.19591/j.cnki.cn11-1974/tf.2021120004 |