A Selective Etching Route for Large-Scale Fabrication of β-Ga<sub>2</sub>O<sub>3</sub> Micro-/Nanotube Arrays

A Selective Etching Route for Large-Scale Fabrication of β-Ga<sub>2</sub>O<sub>3</sub> Micro-/Nanotube Arrays

In this paper, based on the different etching characteristics between GaN and Ga<sub>2</sub>O<sub>3</sub>, large-scale and vertically aligned β-Ga<sub>2</sub>O<sub>3</sub> nanotube (NT) and microtube (MT) arrays were fabricated on the GaN template by a...

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Bibliographic Details
Main Authors: Shan Ding, Liying Zhang, Yuewen Li, Xiangqian Xiu, Zili Xie, Tao Tao, Bin Liu, Peng Chen, Rong Zhang, Youdou Zheng
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Nanomaterials
Subjects:
β-Ga<sub>2</sub>O<sub>3</sub>
micro-/nanotubes
GaN template
ICP etching
Online Access:https://www.mdpi.com/2079-4991/11/12/3327

Internet

https://www.mdpi.com/2079-4991/11/12/3327

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