Analysis of the Influence of Fabrication Errors on the Far-Field Performance of Si and Si<sub>3</sub>N<sub>4</sub> Antennas

Analysis of the Influence of Fabrication Errors on the Far-Field Performance of Si and Si<sub>3</sub>N<sub>4</sub> Antennas

Antennas are important components in optical phased arrays. However, their far-field performance deteriorates when random phase noise is introduced because of fabricating errors. For the first time, we use a finite-difference time-domain solution to quantitatively analyze the far-field characteristi...

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Bibliographic Details
Main Authors: Yifan Xin, Wenyuan Liao, Lei Yu, Pengfei Ma, Zheng Wang, Yibo Yang, Licheng Chen, Pengfei Wang, Yejin Zhang, Jiaoqing Pan
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Photonics
Subjects:
LiDAR
optical phased array
optical antenna design fabrication error
silicon
silicon nitride
Online Access:https://www.mdpi.com/2304-6732/11/1/81

Internet

https://www.mdpi.com/2304-6732/11/1/81

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