Sublayer-Enhanced Growth of Highly Ordered Mn<sub>5</sub>Ge<sub>3</sub> Thin Film on Si(111)
Mn<sub>5</sub>Ge<sub>3</sub> epitaxial thin films previously grown mainly on Ge substrate have been synthesized on Si(111) using the co-deposition of Mn and Ge at a temperature of 390 °C. RMS roughness decreases by almost a factor of two in the transition from a completely po...
Main Authors: | , , , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-12-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/12/24/4365 |