Fabrication and Characterization of the Li-Doped ZnO Thin Films Piezoelectric Energy Harvester with Multi-Resonant Frequencies
A novel piezoelectric energy harvester with multi-resonant frequencies based on Li-doped ZnO (LZO) thin films is proposed in this paper, consisting of an elastic element with three (or more) different length cantilever beam arrays and a piezoelectric structure (Al/Li-doped ZnO/Pt/Ti). The LZO thin f...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/3/212 |