Fabrication of fluidic submicron-channels by pulsed laser-induced buckling of SiOx films on fused silica
Abstract Recently, considerable attention has been drawn to the field of micro/nanofluidic channels. However, current methods for fabricating micro/nanochannels are complex, costly, and time-intensive. In the present work, we successfully fabricated transparent submicron-channels on fused silica sub...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer
2024-03-01
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| Series: | Discover Nano |
| Subjects: | |
| Online Access: | https://doi.org/10.1186/s11671-024-03987-w |