Simulation-based investigation of the metrological interface structural resolution capability of X-ray computed tomography scanners

<p>The miniaturisation of components leads to new demands on measurement systems. One of these is the resolution. As a volumetric analysis method and method of non-destructive testing, industrial X-ray computed tomography (XCT) has the ability to measure geometrical features and their correspo...

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Bibliographic Details
Main Authors: M. Busch, T. Hausotte
Format: Article
Language:English
Published: Copernicus Publications 2023-01-01
Series:Journal of Sensors and Sensor Systems
Online Access:https://jsss.copernicus.org/articles/12/1/2023/jsss-12-1-2023.pdf