Simulation-based investigation of the metrological interface structural resolution capability of X-ray computed tomography scanners
<p>The miniaturisation of components leads to new demands on measurement systems. One of these is the resolution. As a volumetric analysis method and method of non-destructive testing, industrial X-ray computed tomography (XCT) has the ability to measure geometrical features and their correspo...
Main Authors: | M. Busch, T. Hausotte |
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Format: | Article |
Language: | English |
Published: |
Copernicus Publications
2023-01-01
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Series: | Journal of Sensors and Sensor Systems |
Online Access: | https://jsss.copernicus.org/articles/12/1/2023/jsss-12-1-2023.pdf |
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