Novel Fabrication Technology for Clamped Micron-Thick Titanium Diaphragms Used for the Packaging of an Implantable MEMS Acoustic Transducer

Novel Fabrication Technology for Clamped Micron-Thick Titanium Diaphragms Used for the Packaging of an Implantable MEMS Acoustic Transducer

Micro-Electro-Mechanical Systems (MEMS) acoustic transducers are highly sophisticated devices with high sensing performance, small size, and low power consumption. To be applied in an implantable medical device, they require a customized packaging solution with a protecting shell, usually made from...

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Bibliographic Details
Main Authors: Lukas Prochazka, Alexander Huber, Michael Schneider, Naureen Ghafoor, Jens Birch, Flurin Pfiffner
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Micromachines
Subjects:
implantable acoustic transducer
packaging
titanium/platinum multi-layer diaphragm
polymer sacrificial material
DC magnetron sputtering
intrinsic stress
Online Access:https://www.mdpi.com/2072-666X/13/1/74

Internet

https://www.mdpi.com/2072-666X/13/1/74

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