Probabilistic Characteristics of Subprocesses in a Glow Discharge
As a result of analyzing experimental data, analytical expressions were developed for calculating the probabilistic characteristics of the most tangible subprocesses during nitriding in a glow discharge.
| Main Authors: | , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/611 |