2 Degree-of-Freedom Spiral Micromirror Manipulator
We present a process for the fabrication and assembly of a novel spiral-shaped micromirror manipulator for free space optical switching. The manipulator is comprised of two different parts, which are fabricated using conventional surface micromachining processes. The footprint of the assembled devic...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2008-04-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/2/2/2_2_265/_pdf/-char/en |