Physical, Electrical, and Reliability Considerations for Copper BEOL Layout Design Rules
The continuous scaling needed for better performance and higher density has introduced some new challenges to the back end of line (BEOL) in terms of layout and design. Reductions in metal line width, spacing, and thickness require major changes in both process and design environments. Advanced deep...
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| Format: | Article |
| Language: | English |
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MDPI AG
2018-06-01
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| Series: | Journal of Low Power Electronics and Applications |
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| Online Access: | http://www.mdpi.com/2079-9268/8/2/20 |