Gas pressure measurement using micro-corona-discharging effect in surface acoustic wave resonators
This paper reports a gas pressure sensor using surface acoustic wave resonator (SAWR) based on both the field-induced electron emission and the micro-corona-discharging (MCD) phenomena. With the micron-scale finger-gap of electrodes covered with SiO2 passivation layer, the enhanced field-effect emis...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-06-01
|
| Series: | Results in Physics |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S221137972100365X |