High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer

High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer

Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and...

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Bibliographic Details
Main Authors: Wenjie Wu, Panpan Zheng, Jinquan Liu, Zhu Li, Ji Fan, Huafeng Liu, Liangcheng Tu
Format: Article
Language:English
Published: MDPI AG 2017-09-01
Series:Sensors
Subjects:
capacitive sensor
area-changed
parasitic capacitance
fringe effect
sensitivity improvement
micro accelerometer
Online Access:https://www.mdpi.com/1424-8220/17/9/2158

Internet

https://www.mdpi.com/1424-8220/17/9/2158

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