Novel Air Flow Meter for an Automobile Engine Using a Si Sensor with Porous Si Thermal Isolation

An air flow meter for measuring the intake air of an automobile engine is presented. It is based on a miniaturized silicon thermal mass flow sensor using a thick porous Si (Po-Si) layer for local thermal isolation from the Si substrate, on which the sensor active elements are integrated. The sensor...

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Bibliographic Details
Main Authors: Androula G. Nassiopoulou, Panagiotis Sarafis, Emmanouel Hourdakis
Format: Article
Language:English
Published: MDPI AG 2012-11-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/12/11/14838