Fabrication of X-ray absorption gratings by centrifugal deposition of bimodal tungsten particles in high aspect ratio silicon templates
Abstract Grating-based X-ray imaging employs high aspect ratio absorption gratings to generate contrast induced by attenuating, phase-shifting, and small-angle scattering properties of the imaged object. The fabrication of the absorption gratings remains a crucial challenge of the method on its path...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2022-03-01
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Series: | Scientific Reports |
Online Access: | https://doi.org/10.1038/s41598-022-08222-z |