Fabrication of X-ray absorption gratings by centrifugal deposition of bimodal tungsten particles in high aspect ratio silicon templates

Abstract Grating-based X-ray imaging employs high aspect ratio absorption gratings to generate contrast induced by attenuating, phase-shifting, and small-angle scattering properties of the imaged object. The fabrication of the absorption gratings remains a crucial challenge of the method on its path...

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Bibliographic Details
Main Authors: Simon Pinzek, Alex Gustschin, Nikolai Gustschin, Manuel Viermetz, Franz Pfeiffer
Format: Article
Language:English
Published: Nature Portfolio 2022-03-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-022-08222-z