An Orthogonal Type Two-Axis Lloyd’s Mirror for Holographic Fabrication of Two-Dimensional Planar Scale Gratings with Large Area
In this paper, an orthogonal type two-axis Lloyd’s mirror interference lithography technique was employed to fabricate two-dimensional planar scale gratings for surface encoder application. The two-axis Lloyd’s mirror interferometer is composed of a substrate and two reflective m...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/8/11/2283 |