Parameter Optimization of RB-SiC Polishing by Femtosecond Laser

Reaction-boned silicon carbide (RB-SiC) is considered a new material for large lightweight ground-based space telescopes due to its high specific stiffness, low thermal deformation, and excellent optical quality. The excellent mechanical properties of RB-SiC result in the low efficiency of tradition...

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Bibliographic Details
Main Authors: Tingkai Yang, Changhua Liu, Tao Chen, Meng Shao, Chun Jiang, Changzheng Lu, Shijun Song
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/16/4/1582