High-Precision Compensation Method for Image Plane Deformation in the Doubly Telecentric Projection Optical System
The deformation of the image plane due to gravity, clamping forces, and surface shape errors can significantly impact the exposure accuracy and imaging quality of the doubly telecentric projection optical system. To address the issues of resolution and image quality degradation resulting from non-co...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-03-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/15/5/2691 |