Preparation and properties of different dielectric films with Al metal electrode
Abstract Al electrodes with different thickness (sheet resistance 2–100 Ω/□) were deposited onto the films of polypropylene (PP), polyester (PET) and polyimide (PI) by vacuum evaporation. The root‐mean‐square (RMS) and peak‐to‐valley roughness of Al electrodes were characterised by atomic force micr...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-09-01
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| Series: | IET Nanodielectrics |
| Online Access: | https://doi.org/10.1049/nde2.12037 |