Preparation and properties of different dielectric films with Al metal electrode
Abstract Al electrodes with different thickness (sheet resistance 2–100 Ω/□) were deposited onto the films of polypropylene (PP), polyester (PET) and polyimide (PI) by vacuum evaporation. The root‐mean‐square (RMS) and peak‐to‐valley roughness of Al electrodes were characterised by atomic force micr...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-09-01
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| Series: | IET Nanodielectrics |
| Online Access: | https://doi.org/10.1049/nde2.12037 |
| _version_ | 1811179341137051648 |
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| author | Qi Dong Shao‐Long Zhong Qi‐Kun Feng Ming‐Sheng Zheng Jiang‐Bo Ping Zhi‐Min Dang |
| author_facet | Qi Dong Shao‐Long Zhong Qi‐Kun Feng Ming‐Sheng Zheng Jiang‐Bo Ping Zhi‐Min Dang |
| author_sort | Qi Dong |
| collection | DOAJ |
| description | Abstract Al electrodes with different thickness (sheet resistance 2–100 Ω/□) were deposited onto the films of polypropylene (PP), polyester (PET) and polyimide (PI) by vacuum evaporation. The root‐mean‐square (RMS) and peak‐to‐valley roughness of Al electrodes were characterised by atomic force microscopy (AFM). It was found that the PET and PI substrates showed the reduced threshold thickness of the continuous growth of Al electrodes compared with the PP substrate. The sheet resistance of Al electrodes decreases with the increase of peak‐to‐valley roughness. The current surge capability of the Al electrode decreases with the increase of RMS roughness. The Al electrode deposited on the PET film has higher sheet resistance and better current carrying capability, and the self‐healing performance of metallised film is also excellent among three kinds of films. |
| first_indexed | 2024-04-11T06:34:08Z |
| format | Article |
| id | doaj.art-bf2d36fe17964509bc70d97c2b04bf52 |
| institution | Directory Open Access Journal |
| issn | 2514-3255 |
| language | English |
| last_indexed | 2024-04-11T06:34:08Z |
| publishDate | 2022-09-01 |
| publisher | Wiley |
| record_format | Article |
| series | IET Nanodielectrics |
| spelling | doaj.art-bf2d36fe17964509bc70d97c2b04bf522022-12-22T04:39:55ZengWileyIET Nanodielectrics2514-32552022-09-0153-412513110.1049/nde2.12037Preparation and properties of different dielectric films with Al metal electrodeQi Dong0Shao‐Long Zhong1Qi‐Kun Feng2Ming‐Sheng Zheng3Jiang‐Bo Ping4Zhi‐Min Dang5Department of Electrical Engineering State Key Laboratory of Power System Tsinghua University Beijing ChinaDepartment of Electrical Engineering State Key Laboratory of Power System Tsinghua University Beijing ChinaDepartment of Electrical Engineering State Key Laboratory of Power System Tsinghua University Beijing ChinaSchool of Chemistry and Biological Engineering University of Science and Technology Beijing Beijing ChinaDepartment of Electrical Engineering State Key Laboratory of Power System Tsinghua University Beijing ChinaDepartment of Electrical Engineering State Key Laboratory of Power System Tsinghua University Beijing ChinaAbstract Al electrodes with different thickness (sheet resistance 2–100 Ω/□) were deposited onto the films of polypropylene (PP), polyester (PET) and polyimide (PI) by vacuum evaporation. The root‐mean‐square (RMS) and peak‐to‐valley roughness of Al electrodes were characterised by atomic force microscopy (AFM). It was found that the PET and PI substrates showed the reduced threshold thickness of the continuous growth of Al electrodes compared with the PP substrate. The sheet resistance of Al electrodes decreases with the increase of peak‐to‐valley roughness. The current surge capability of the Al electrode decreases with the increase of RMS roughness. The Al electrode deposited on the PET film has higher sheet resistance and better current carrying capability, and the self‐healing performance of metallised film is also excellent among three kinds of films.https://doi.org/10.1049/nde2.12037 |
| spellingShingle | Qi Dong Shao‐Long Zhong Qi‐Kun Feng Ming‐Sheng Zheng Jiang‐Bo Ping Zhi‐Min Dang Preparation and properties of different dielectric films with Al metal electrode IET Nanodielectrics |
| title | Preparation and properties of different dielectric films with Al metal electrode |
| title_full | Preparation and properties of different dielectric films with Al metal electrode |
| title_fullStr | Preparation and properties of different dielectric films with Al metal electrode |
| title_full_unstemmed | Preparation and properties of different dielectric films with Al metal electrode |
| title_short | Preparation and properties of different dielectric films with Al metal electrode |
| title_sort | preparation and properties of different dielectric films with al metal electrode |
| url | https://doi.org/10.1049/nde2.12037 |
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