Preparation and properties of different dielectric films with Al metal electrode

Preparation and properties of different dielectric films with Al metal electrode

Abstract Al electrodes with different thickness (sheet resistance 2–100 Ω/□) were deposited onto the films of polypropylene (PP), polyester (PET) and polyimide (PI) by vacuum evaporation. The root‐mean‐square (RMS) and peak‐to‐valley roughness of Al electrodes were characterised by atomic force micr...

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Bibliographic Details
Main Authors: Qi Dong, Shao‐Long Zhong, Qi‐Kun Feng, Ming‐Sheng Zheng, Jiang‐Bo Ping, Zhi‐Min Dang
Format: Article
Language:English
Published: Wiley 2022-09-01
Series:IET Nanodielectrics
Online Access:https://doi.org/10.1049/nde2.12037

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