Development of Pd/TiO<sub>2</sub> Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H<sub>2</sub> Gas Sensor
The influence of sensitive porous films obtained by pulsed laser deposition (PLD) on the response of surface acoustic wave (SAW) sensors on hydrogen at room temperature (RT) was studied. Monolayer films of TiO<sub>2</sub> and bilayer films of Pd/TiO<sub>2</sub> were deposited...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-04-01
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| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/10/4/760 |