Evaluation of interfacial strength of multilayer thin films polymer by nanoindentation technique

Multilayer thin films polymer have been commonly used in a wide range of electronics applications, such as solar cells, photoconductors, semiconductors, and light-emitting diodes, in which failure due to delamination can occur. For evaluating and improving the quality of a multilayer thin-film produ...

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Bibliographic Details
Main Authors: Kenji INOUE, Farid TRIAWAN, Kazuaki INABA, Kikuo KISHIMOTO, Masashi NISHI, Michiyo SEKIYA, Kunihiko SEKIDO, Akihito SAITOH
Format: Article
Language:English
Published: The Japan Society of Mechanical Engineers 2019-02-01
Series:Mechanical Engineering Journal
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/mej/6/1/6_18-00326/_pdf/-char/en