Microwave Plasma Assisted Aerosol Deposition (μ-PAD) for Ceramic Coating Applications
To improve plasma and chemical resistance on various vacuum components used for semiconductor manufacturing equipment, various ceramic coating techniques have been applied. Among these methods for ceramic coating, the well-known atmospheric plasma spray (APS) is advantageous for providing thick film...
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-12-01
|
| Series: | Ceramics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2571-6131/5/4/83 |