Systematic analysis on the chemical reaction to the material removal in bonnet polishing of fused silica glass
Fused silica glass, known for its exceptional physical and chemical properties, is widely used across diverse industries. Cerium oxide (CeO2), a common polishing abrasive, is extensively employed in polishing fused silica surfaces. Studies have revealed that chemical reactions occur on fused silica...
| Hauptverfasser: | , , , , , , , , , , |
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| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Elsevier
2025-01-01
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| Schriftenreihe: | Journal of Materials Research and Technology |
| Schlagworte: | |
| Online Zugang: | http://www.sciencedirect.com/science/article/pii/S223878542402859X |