Investigation of SiC and C nanostructures synthesized by the method of chemical vapor deposition on Ni films
The paper presents the results of experiments on synthesis of SiC and C nanostructures by the method of microwave plasma assisted chemical vapor deposition on Ni films. The plates of polished single-crystal and porous silicon were used, on the surface of which a thin layer of Ni was deposited. The...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Al-Farabi Kazakh National University
2018-06-01
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| Series: | Physical Sciences and Technology |
| Online Access: | http://phst/index.php/journal/article/view/126 |