Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement

Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement

Abstract Based on laser Thomson scattering (TS) measurements and finite element method (FEM) simulations of electron density in inductively coupled plasma (ICP), the simulated local pressure calibration curves of ICP generator are obtained by comparing the experimental and simulated electron density...

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Bibliographic Details
Main Authors: Jinhai Sun, Yong-Qiang Liu, Yan Zheng, Jielin Shi, Yu Li, Yarui Zhao, Xutao Zhang, He Cai, Xianli Zhu, Xinxue Sun, Zengming Chao, Hongcheng Yin, Hongbin Ding
Format: Article
Language:English
Published: Nature Portfolio 2022-03-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-022-08679-y

Internet

https://doi.org/10.1038/s41598-022-08679-y

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