Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement
Abstract Based on laser Thomson scattering (TS) measurements and finite element method (FEM) simulations of electron density in inductively coupled plasma (ICP), the simulated local pressure calibration curves of ICP generator are obtained by comparing the experimental and simulated electron density...
| Main Authors: | , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2022-03-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-022-08679-y |
| _version_ | 1818283508432371712 |
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| author | Jinhai Sun Yong-Qiang Liu Yan Zheng Jielin Shi Yu Li Yarui Zhao Xutao Zhang He Cai Xianli Zhu Xinxue Sun Zengming Chao Hongcheng Yin Hongbin Ding |
| author_facet | Jinhai Sun Yong-Qiang Liu Yan Zheng Jielin Shi Yu Li Yarui Zhao Xutao Zhang He Cai Xianli Zhu Xinxue Sun Zengming Chao Hongcheng Yin Hongbin Ding |
| author_sort | Jinhai Sun |
| collection | DOAJ |
| description | Abstract Based on laser Thomson scattering (TS) measurements and finite element method (FEM) simulations of electron density in inductively coupled plasma (ICP), the simulated local pressure calibration curves of ICP generator are obtained by comparing the experimental and simulated electron density distributions and maxima. The equation coefficients of theoretical model associated with the ICP generator experimental system can be obtained by fitting the simulation curve with the least square method, and the theoretical pressure calibration curves under different absorbed powers can be further obtained. Combined with the vacuum gauge measurements, both the simulated and theoretical pressure calibration curves can give the true local pressure in the plasma. The results of the local pressure calibration at the different absorbed powers show that the density gradient from the vacuum gauge sensor to the center of the coil in ICP generator cavity becomes larger with the increase of electron density, resulting in a larger gap between the measured value and the pressure calibration value. This calibration method helps to grasp the local pressure of ICP as an external control factor and helps to study the physicochemical mechanism of ICP in order to achieve higher performance in ICP etching, material modification, etc. |
| first_indexed | 2024-12-13T00:38:01Z |
| format | Article |
| id | doaj.art-c0696266971647d88ab8db166561d3cf |
| institution | Directory Open Access Journal |
| issn | 2045-2322 |
| language | English |
| last_indexed | 2024-12-13T00:38:01Z |
| publishDate | 2022-03-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Scientific Reports |
| spelling | doaj.art-c0696266971647d88ab8db166561d3cf2022-12-22T00:05:11ZengNature PortfolioScientific Reports2045-23222022-03-011211910.1038/s41598-022-08679-yLocal pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurementJinhai Sun0Yong-Qiang Liu1Yan Zheng2Jielin Shi3Yu Li4Yarui Zhao5Xutao Zhang6He Cai7Xianli Zhu8Xinxue Sun9Zengming Chao10Hongcheng Yin11Hongbin Ding12Science and Technology on Electromagnetic Scattering LaboratoryScience and Technology on Electromagnetic Scattering LaboratoryScience and Technology on Electromagnetic Scattering LaboratorySchool of Physics, Dalian University of TechnologySchool of Physics, Dalian University of TechnologySchool of Physics, Dalian University of TechnologyScience and Technology on Electromagnetic Scattering LaboratoryScience and Technology on Electromagnetic Scattering LaboratoryScience and Technology on Electromagnetic Scattering LaboratoryScience and Technology on Electromagnetic Scattering LaboratoryScience and Technology on Electromagnetic Scattering LaboratoryScience and Technology on Electromagnetic Scattering LaboratorySchool of Physics, Dalian University of TechnologyAbstract Based on laser Thomson scattering (TS) measurements and finite element method (FEM) simulations of electron density in inductively coupled plasma (ICP), the simulated local pressure calibration curves of ICP generator are obtained by comparing the experimental and simulated electron density distributions and maxima. The equation coefficients of theoretical model associated with the ICP generator experimental system can be obtained by fitting the simulation curve with the least square method, and the theoretical pressure calibration curves under different absorbed powers can be further obtained. Combined with the vacuum gauge measurements, both the simulated and theoretical pressure calibration curves can give the true local pressure in the plasma. The results of the local pressure calibration at the different absorbed powers show that the density gradient from the vacuum gauge sensor to the center of the coil in ICP generator cavity becomes larger with the increase of electron density, resulting in a larger gap between the measured value and the pressure calibration value. This calibration method helps to grasp the local pressure of ICP as an external control factor and helps to study the physicochemical mechanism of ICP in order to achieve higher performance in ICP etching, material modification, etc.https://doi.org/10.1038/s41598-022-08679-y |
| spellingShingle | Jinhai Sun Yong-Qiang Liu Yan Zheng Jielin Shi Yu Li Yarui Zhao Xutao Zhang He Cai Xianli Zhu Xinxue Sun Zengming Chao Hongcheng Yin Hongbin Ding Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement Scientific Reports |
| title | Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement |
| title_full | Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement |
| title_fullStr | Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement |
| title_full_unstemmed | Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement |
| title_short | Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement |
| title_sort | local pressure calibration method of inductively coupled plasma generator based on laser thomson scattering measurement |
| url | https://doi.org/10.1038/s41598-022-08679-y |
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